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Semi-Automatic Prober
(for 8-inch wafer Low Current Measurement)


Model AP-80A

For 8-inch wafer Semi-Automatic Prober

High-performance semi-automatic prober capable of measuring fA-level low currents

Low current measurement

  • 01The fully-guarded structure allows accurate low current measurement down to fA-level

  • 02This model allows low-noise, high-accuracy measurement

Easy operation

  • 01Both external automatic control and manual joy stick operation (six movement modes) are possible

    Both semi-automatic operation and manual operation are easy, which improves measurement efficiency.

Standard model for systems and software of major measuring instrument manufacturers

  • 01Keysight Technologies

    B1500A Semiconductor Device Parameter Analyzer EasyEXPERT

  • 02Keithley Instruments

    Systems and measuring instruments with ACS (measurement software)

  • 03Can be customized for other measuring instruments and software

A wide variety of options and customization

  • Can be equipped with hot chuck (+40℃ to +200℃) for evaluation of temperature-dependent properties
  • Can be equipped with a probe card for low current by using a probe card adapter
  • Customizable according to intended use

Specifications: Model AP-80A Semi-Automatic Prober for Low Current Measurement (for 8-inch wafer)

Maximum wafer size φ200mm
Stage travel X: 210mm Y: 250mm
Travel resolution 1μm
in the positioning stage
Repeat accuracy
in the positioning stage
Z stroke 9mm+0.5mm (overdrive)
Θ travel ±5°
Control interface GP-IB
External dimensions
820mm×930mm×1, 220mm (excluding options)
System weight 500kg (excluding options)

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