Temperature Controller for Hot Chuck and Thermo Chuck

To be used together with a prober for evaluating temperature characteristics of devices

Model AT-200A
Model TC-8

Model AT-200A Temperature Controller for Hot Chuck
Model TC-6C Hot Chuck (for 6-inch wafer)
Model TC-8 Hot Chuck (for 8-inch wafer)

Can be set within the range from +40℃ to +200℃ (+300℃)
Note: Temperature range of TC-6C can be extended up to 300℃

Model AT-300A
Model HC-80B

Model AT-300A Temperature Controller for Thermo Chuck
Model HC-80B Thermo Chuck (for 8-inch wafer)

Can be set within the range from -50℃ to +200℃

Features

Easy operation

  • Allows easy parameter setting on the LCD touch screen
  • GP-IB interface control supports automation of temperature cycle test, sequence measurement, etc.

High-speed, highly accurate temperature control

  • Integration of the general PID control and a unique control method allows quick and highly accurate temperature control

Highly accurate measurement

Use of low-noise-type direct-current regulated power supply for heat source control

  • Reduces noise to achieve highly accurate measurement.

Safety design

Safety design with overtemperature protector, abnormal ambient temperature detection function, etc.

  • Prevents accidents caused by temperature runaway as well as damage to measuring devices, probes and probers.

Dew condensation prevention

Model AT-300A with low-temperature specifications prevents dew condensation with dry air purge

  • Reduces influence on measurement, such as leakage.

Note: Model 708fT and Model AP-80 can be equipped with a thermo chuck for low temperature

Specifications

Hot Chuck Model TC-6C (for 6-inch wafer)/TC8 (for 8-inch wafer)

Chuck size TC-6C φ150mm
TC-8 φ200mm
Range of set temperature From +40℃ to +200℃ (+300℃)
Temperature distribution accuracy ≤±2.0℃

*Temperature range of TC-6C can be extended up to 300℃

Model AT-200A Temperature Controller for Hot Chuck

Temperature indication accuracy ≤±0.5℃
Temperature stability ≤±1.0℃
Temperature resolution Setting: 0.1℃ Indication: 0.1℃
Temperature rise time +40℃ →+200℃: within 30 minutes
+40℃ →+300℃: within 60 minutes
Temperature fall time +200℃ →+40℃: within 30 minutes
+300℃ →+40℃: within 60 minutes
Control interface GP-IB
External dimensions (WxDxH)* 430mm×596mm×203mm
System weight* About 54kg
(including 31 kg DC power supply, excluding chiller unit)

*Example of AT-200A standard configuration

Model HC-80B Thermo Chuck (for 8-inch wafer)

Chuck size φ200mm
Range of set temperature From -50℃ to +200℃
Temperature distribution accuracy ≤±(Setting temp. 0.5%+0.5℃)

Model AT-300A Temperature Controller for Thermo Chuck

Temperature indication accuracy ≤±0.5℃
Temperature stability ≤±0.5℃
Temperature resolution Setting: 0.1℃ Indication: 0.1℃
Temperature rise time +30℃→+200℃: within 15 minutes
-50℃ →+30℃: within 10 minutes
Temperature fall time +200℃ →+30℃: within 10 minutes
+30℃→-50℃: within 40 minutes
Control interface GP-IB
External dimensions (WxDxH)* 620mm×1,029mm×1,750mm
System weight* 360kg (including chiller unit)

*Example of AT-300A standard configuration

Temperature Controller Availability

Prober model 705B MP-10A 705A-WG7 708fT AP-80 PW-8000 * BP-3000
Model AT-200A/Hot Chuck    
Model AT-300A/Thermo Chuck          

○: Option available
* Supports only custom chuck/controller option

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