Manual Prober for Low Current Measurement (for 8-inch wafer)

Model 708fT

This manual prober model can measure fA-level low current.

Features

Low current measurement

  • The three-layer structure with guard and shield allows measurement of fA-level low current
  • Despite the simple structure, this model allows low-noise, high-accuracy measurement

Easy operation

Air bearing stage for easy one-handed operation

  • Allows stage positioning within a short time, which improves measurement efficiency

Safety design

Safety lock mechanism to prevent damage to devices and probes caused by improper contact operation

  • Reduces wasteful remaking of devices, remeasurement, and probe maintenance.

Customizable

Can be equipped with thermo chuck (-50℃ to +200℃ dew condensation prevention mechanism with dry air purge) or heat chuck (+40℃ to +300℃) for evaluation of temperature-dependent properties
Customizable according to intended use

Specifications

Model 708fT
Manual Prober for Low Current Measurement (for 8-inch wafer)

Wafer size –200φmm
Stage travel
(rough adjustment)
X: 220mm Y: 270mm
Sub-stage travel
(fine adjustment)
X: 10mm Y: 10mm
Z stroke 0/0.3/3.5mm+3mm
Θtravel ±5°
External dimensions (WxDxH) 897mm×863mm×400mm (excluding options)
System weight 120kg (excluding options)

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