Manual Prober for Evaluation/Analysis (for 12-inch wafer/large substrate)

Model 705A-WG7

This model is a general-purpose manual prober for a wide variety of analyses of wafers and FPD substrates of up to 12 inches.

Features

Easy operation

Air bearing stage for easy one-handed operation

  • Allows stage positioning within a short time, which improves measurement efficiency.

Wide contact area

Slide table for securing wide probing area

  • Eliminates the need to reposition the device under measurement, which improves evaluation efficiency.

Safety design

Safety lock mechanism to prevent damage to devices and probes caused by improper contact operation

  • Reduces wasteful remaking of devices, remeasurement, and probe maintenance.

Customizable

Customizable according to the intended use, for example, with addition of microscope or laser cutter

Specifications

Model 705A-WG7
Manual Prober (for 12-inch wafer/large substrate)

Device size Wafer –φ300mm
Large substrate –500mm*400mm
Stage travel
(rough adjustment)
X: 500mm Y: 400mm
Sub-stage travel
(fine adjustment)
X: 25mm Y: 25mm
Z stroke 0/0.3/3.5mm+37.5mm
Θtravel Rough adjustment: ±45°
Fine adjustment: ±5°
External dimensions (WxDxH) 978mm×1,038mm×748mm (excluding options)
System weight 130kg (excluding options)

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