Manual Prober for Evaluation/Analysis (for 12-inch wafer/large substrate）
This model is a general-purpose manual prober for a wide variety of analyses of wafers and FPD substrates of up to 12 inches.
Air bearing stage for easy one-handed operation
- Allows stage positioning within a short time, which improves measurement efficiency.
Wide contact area
Slide table for securing wide probing area
- Eliminates the need to reposition the device under measurement, which improves evaluation efficiency.
Safety lock mechanism to prevent damage to devices and probes caused by improper contact operation
- Reduces wasteful remaking of devices, remeasurement, and probe maintenance.
Customizable according to the intended use, for example, with addition of microscope or laser cutter
Manual Prober (for 12-inch wafer/large substrate)
|X: 500mm Y: 400mm|
|X: 25mm Y: 25mm|
|Θtravel||Rough adjustment: ±45°
Fine adjustment: ±5°
|External dimensions (WxDxH)||978mm×1,038mm×748mm (excluding options)|
|System weight||130kg (excluding options)|