The concept is to dedicate to 12-inch Full Wafer Contact with featuring Probe Card Auto-Adjust function, referenced mark alignment method and high rigidity stage for stable & reliable probing.
Manual Prober Model MP-30
12inch wafer Manual Prober featuring low leakage test. Hot-chuck (+40 to +300) and laser cut system are available as option.
TDDB/EM evaluation Prober Model TEP-12A
TDDB/EM evaluation probing station for up to 12-inch wafers. This can measure ultra low current and is adapted to installing Z-axis correction function to avoid needle displacement by heat expansion.
Manual Prober Model MP-10A
8inch wafer manual Prober featuring Air bearing stage, which makes it easy to operate widely. Hot-chuck (+40 to +300) and laser cut system are available as option. Use it to test new device such as High voltage device and MEMS. Also offer 6inch wafer manual Prober (Model705B.)
Manual Prober Model 708fT
8inch wafer manual Prober featuring low leakage test, which is designed as desktop size. Thermo chuck(-50 to +200) option is available.
Manual Prober for Cu wiring
Manual prober for Cu wired wafers. With use of a special probe card we originally developed, this manual prober achieves an environment in which a Cu wired wafer is not oxidized in a high temperature state. This is a probing system supporting Cu wired waf
new Semi-automatic Prober Model AP-80
Semi-automatic Prober facilitates to measure Minute Electric current at fA level for 8 inch wafer.
Thermo chuck option is available for high voltage measurement such as MOSFET and IGBT.
*Thermo chuck system provides -50℃ to +200℃.
*Mounted GPIB interface allows controlling AP-80 from exterior and enable to measure automatically.
*Support leading instrument manufacturer's system and software.
8inch wafer manual Prober featuring low leakage test, power MOSFET, IGBT and device for high voltage with optional thermo chuck (-50 to +200.) Also offers GPIB interface as a standard feature and enable to measure automatically by external control.
Auto Prober Model SP-8700
Automatic prober for 8-inch wafers enabling to measure ultra low current less than 50fA by using MJC made Ultra low leakage Probe Card.
OPTION
Thermo-Chuck control system(-50degrees - 200degrees)
Hot-Chuck control system(RT - +300degrees)
Laser system
Shield box
Micro manipulators
Coaxial probes
Probes
Cables
Worktable etc...
Probe Card Tester Model PC-763
For High-precision measurement of contact resistance, insulation resistance, planarity and XY coordinates of each probe. PC-763 can measure 2,048 pins.